[mems-talk] Striations during spin-coating

[Kevin Paul Nichols]

Is there any particular reason you need to use spin coating?

- Kevin Nichols

Kevin Paul Nichols
MESA+ Institute for Nanotechnology
Mesoscale Chemical Systems
Meander 151
University of Twente
Postbus 217
7500 AE Enschede
The Netherlands

Office: +31 (0)53 489 26 31
Mobile: +31 (0)6 49 312 471
Fax   : +31 (0)53 489 35 95
Email : k.p.nichols at utwente.nl


On Oct 24, 2007, at 11:58 PM, Sandip Agarwal wrote:

> I am not trying to planarize the substrate. I want a coat ~ 0.2-0.5
> microns of the polymer on the posts of the substrate. Of course, there
> would stuff on the recesses, but that's not a concern.
>