[mems-talk] germanium etch

[Shay Kaplan]

Hi Andrea,
The best etchants are commercial ones like CR-7 or CR-14, chrome etch 18,
and similar.
They have a long practical shelf life and are good investment.

shay 

-----Original Message-----
From: mems-talk-bounces at memsnet.org [mailto:mems-talk-bounces at memsnet.org]
On Behalf Of Andrea Mazzolari
Sent: Sunday, September 02, 2007 11:04 PM
To: General MEMS discussion
Subject: [mems-talk] germanium etch

Hi all, i need to make etch of germanium.
As etchant i plan to use HNA solution. Here are the steps:

1) deposition of 100nm Cr mask
2) deposition of photoresist s1813 and patterning
3) etch Cr  (???)
4) Germanium etch (HNA).

could someone give me suggestions about a proper etchant which will etch Cr
layer without attack s1813 ?