[mems-talk] Numbering of substrates in a batch

[bobhendu at aol.com]

I would mark the backside of the substrate using a diamond scribe. Bob Henderson


-----Original Message-----
From: Svyatoslav Alimov <alimovss at yahoo.com>
To: General MEMS discussion <mems-talk at memsnet.org>
Sent: Tue, 4 Sep 2007 12:25 am
Subject: [mems-talk] Numbering of substrates in a batch



Dear MEMS community,

I need to distinguish every substrate produced in the same batch of 2 step 
lift-off process, e.g. with the same mask. Could you suggest some simple way how 
to mark them without changing the mask for every substrate? Producing scratches, 
coloring with permanent marker or attaching of adhesive stickers are not 
acceptable.

Thanks.
Best regards,
Svyatoslav Alimov