[mems-talk] Numbering of substrates in a batch

[Joseph Grogan]

If you have a free spot somewhere on the device side your wafer, you 
could manually apply a dab of photoresist after developing your actual 
pattern, maybe with a syringe or something, so that that mark carries 
through when you evaporate and then lift off. Depending on how steady 
your hand is, you might be able to write letters or numbers with the 
syringe.
-Joe Grogan

Svyatoslav Alimov wrote:
> Dear MEMS community,
> 
> I need to distinguish every substrate produced in the same batch of 2 step lift-off process, e.g. with the same mask. Could you suggest some simple way how to mark them without changing the mask for every substrate? Producing scratches, coloring with permanent marker or attaching of adhesive stickers are not acceptable.