[mems-talk] SU-8 dissolvable in Methanol solution?
Steven Yang
steven030505 at gmail.com
Thu Sep 6 07:48:23 EDT 2007
Hi, all
I plan to do some SU-8 patterned microfluidic channel, and it might be
used for methanol flow. Does anybody have experience that SU-8 will be
dissolved in methanol or not?
btw, I also like to know is it possible to sputtering some metal like
Cr/Au for patterned electrode on SU-8 layer? what will be the PR for
this lift-off process?
and has anybody done the glass to SU-8 (which on Si sub) adhesion
bonding before? what will be the procedure for this?
Thanks a lot!
Best regards,
Steven
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