[mems-talk] SU-8 adhesion on ITO coated glass

[Steve Jung]

Dear all,


I am planning to build SU-8 pillars for a microfluidic device
but have some questions in choosing the right product.

The SU-8 pillars (ca. 10um) are supposed to be built on
an ITO coated glass and I heard the adhesion of SU-8 on
glass substrate is very poor. 


Does the adhesion property get worse on ITO coated glass 
substrates than on normal glass substrates?


Also, does the adhesion property of SU-8 2000 (MCC)
differ from the original SU-8 (MCC)?

If so, could anyone tell me which product would more
be advantageous to coat on an ITO coated glass substrate?


Any help will be appreciated,

Best Regards,

Steve Jung

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Steve Jung
Micro and Nano Engineering Laboratory
Dept. of Electrical Engineering, Sogang University
Tel. : +82-2-717-9800
E-mail : 
yoshi815 at sogang.ac.kr
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