[mems-talk] EDP etch compatibility

Ho Yin Chan chanho1 at msu.edu
Tue Sep 11 23:35:02 EDT 2007


Hi,

 Currently, I am doing EDP process with Ti/Au/Ag stacks on SiO2. It is found
that the metal stack pattern has gone after EDP etch.  Could you share with
me your experience? I am guessing if the problem is caused by Ti.

Thanks
HY


More information about the MEMS-talk mailing list