[mems-talk] Improving resistance and CTE of cantilevers

[sebastian wicklein]

Colleagues,

            The device I'm dealing with right now could be described as
follows

-          4 cantilevers are suspended (50umx150um) and fabricated on SIO

-          The cantilevers are arranged at the edges of a square.

-          The cantilevers are heated by electric current.

 

The problem I have for you is as follows

-          I want to improve the deviation in resistance at room temperature
of the facing cantilevers. 

-          The deviation of the resistance at room temperature should be
smaller than 1%

-          Also the deviation in thermal expansion (CTE) once the elements
are heated should be at least smaller than 2%

Does anyone have a suggestion which material might fit best in this case to
meet these requirements and also, are
there by any change new technologies (manufacturing) to keep the deviation
low?


Regards

Sebastian