[mems-talk] EDP etch compatibility

[Nicolas Duarte]

I know that gold is etched by EDP however I have had no personal  
experience with Ti or Ag.

-Nicolas "Nik" Duarte
Ph.D. Candidate at Penn State University
Department of Electrical Engineering

On Sep 11, 2007, at 11:35 PM, "Ho Yin Chan" <chanho1 at msu.edu> wrote:

> Hi,
>
> Currently, I am doing EDP process with Ti/Au/Ag stacks on SiO2. It  
> is found
> that the metal stack pattern has gone after EDP etch.  Could you  
> share with
> me your experience? I am guessing if the problem is caused by Ti.