[mems-talk] Sapphire etch!

[Kirt Williams]

Good luck. I've tried a lot of etchants, but sapphire is the most inert 
material I've come across.
I found an etching reference that says that 1 H2SO4 : 1 H3PO4, 160 deg C 
(which is really hot) should work, but it barely etched (< 0.3 nm/min) after 
an hour.
You might be better off trying to mill it, but it wears diamond out fast as 
well.
    --Kirt Williams

----- Original Message ----- 
From: "Nitin Shukla" <nitin_cs at yahoo.com>
To: <mems-talk at memsnet.org>
Sent: Thursday, September 13, 2007 7:32 AM
Subject: [mems-talk] Sapphire etch!


> Hi,
> I am looking for a way to selectively etch sapphire (but not Si).
> Thanks,
> Nitin
>