[mems-talk] Plating of small cavities

[P.E.M. Kuijpers]

Dear All,

I want to plate very small cavities (200nm diameter and 500nm deep) with a
conductive material.
Can this been done by electro- or Eless plating?
Or must we use a sputter or evaporation process?

Thanks in advance.

Peter Kuijpers
MiPlaza
DTS/TFF
High Tech Campus 04
Room: WAGp5-11
5656 AE Eindhoven
The Netherlands

Phone.:  (+31 40 27) 98904 (mobex)
mobile:(+31) 06-12507027
fax.:     [+31 40 27) 44769
mailto:p.e.m.kuijpers at philips.com