[mems-talk] Etching and drilling glass cover slips

[Yue Mun Pun, Jeffrey]

Hi,
I intend to etch through holes and/or cut glass cover slips.  Can anyone suggest methods to use?  I was intending to use a Trion RIE machine.  What chemistry and etch rate is suitable?  Can I pattern a layer of Gold or Chromium (say 100nm thick) on the glass before etching it?

Mr. Jeffrey Mun Pun YUE
余文彬
Division of Bioengineering
E3A-07-02, Nanobioanalytics Lab
7 Engineering Drive 1
National University of Singapore
Singapore 117574
Tel: (65) 65166482, Fax: (65) 68723069
E-mail:  g0500396 at nus.edu.sg
Website:  http://www.bioeng.nus.edu.sg/people/trau/Lab_index.htm