[mems-talk] Please HELP me to find a company for vacuum package sealing of 64-pin PGA with a glass-Kovar lid

Chiung C. Lo chiungclo at gmail.com
Wed Sep 19 10:34:25 EDT 2007


Hi,
If you know any company or lab. which provides services of vacuum package
sealing between a standard semiconductor package with a glass-kovar lid,
could you help me to find its contact information?

The targeted vacuum levels is of 10-2 Torr and the maximum die size is 5*5
mm^2.
The order would be a small quantity for prototyping each time.
The preferred package type is 64-pin PGA, but it's fixed.
I know a high-vacuum furnace from SST international model 3140 (
http://www.sstinternational.com/prod_3140.html) can fulfill the requirement.
Thanks a lot!

-- 
Regards,
Chiung C. Lo

Research Assistant and PhD Candidate
Electrical and Computer Engineering Dept.
Carnegie Mellon University


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