[mems-talk] Etching and drilling glass cover slips

[Michael D Martin]

One good method is to Excimer Laser drill.  You can produce features as
small as 100um.  Contact JPSA Laser, jpsalaser.com

-Michael
 U. of Louisville 

>>> "Yue Mun Pun, Jeffrey" <g0500396 at nus.edu.sg> 9/19/2007 12:28 AM
>>>
Hi,
I intend to etch through holes and/or cut glass cover slips.  Can
anyone suggest methods to use?  I was intending to use a Trion RIE
machine.  What chemistry and etch rate is suitable?  Can I pattern a
layer of Gold or Chromium (say 100nm thick) on the glass before etching
it?