[mems-talk] Splash back problems with resist spin

[Edward Sebesta]

I have an MTS 8800 with splashback problems, that is photo resist
redopositing on to the back side of the wafers.
 
I have check the exhaust and made sure it was the maximum. I have tried
recipe modifications with lower acceleration for the resist spin step.
These are the standard causes for the problem.
 
I would like to know the following.
 
1. Does anyone have a contact for persons manufacturing retrofit resist
spin bowls?
 
2. Does anyone have a fix for this or suggestions.
 
Thanks 
 
Ed Sebesta