AW: [mems-talk] Etching and drilling glass cover slips

[Marc Hafner]

Hi,

why don´t you use FOTURAN-glass ,which you can structurize by lithographic
process?

Regards

Marc

-----Ursprungliche Nachricht-----
Von: Yue Mun Pun, Jeffrey [mailto:g0500396 at nus.edu.sg]
Gesendet: Mittwoch, 19. September 2007 06:28
An: General MEMS discussion
Betreff: [mems-talk] Etching and drilling glass cover slips


Hi,
I intend to etch through holes and/or cut glass cover slips.  Can anyone
suggest methods to use?  I was intending to use a Trion RIE machine.  What
chemistry and etch rate is suitable?  Can I pattern a layer of Gold or
Chromium (say 100nm thick) on the glass before etching it?