[mems-talk] Green box light supplier, looking for a Unilamp

[Edward Sebesta]

I am looking for a Unilamp or the equivalent.
 
This was a tilted green box that provided green light over an area to
view resist spins for defects.
 
This is NOT a Hg Lamp with a green filter and it is NOT a bright light
box.
 
It worked by illuminating the wafer and spin non-uniformity show due to
interference effects with the green light.
 
The Unilamp was a common tool in the 1980s, and the manufacturer is no
longer in existence. Advanced semiconductors doesn't need them, it was a
1980s technology and MEMS processing, which seems to be a 1980s
technology for processing could use them.
 
Ed