[mems-talk] Splash back problems with resist spin

[Brent Garber]

Ed,

Slow down and lets fix your problem with the spinner you have.  What is 
the size of your wafer and what size is your chuck?

Brent

Edward Sebesta wrote:
> I have an MTS 8800 with splashback problems, that is photo resist
> redopositing on to the back side of the wafers.
>  
> I have check the exhaust and made sure it was the maximum. I have tried
> recipe modifications with lower acceleration for the resist spin step.
> These are the standard causes for the problem.
>  
> I would like to know the following.
>  
> 1. Does anyone have a contact for persons manufacturing retrofit resist
> spin bowls?
>  
> 2. Does anyone have a fix for this or suggestions.