[mems-talk] Nb wet etching

Sadhana Patil ek.sadhana at gmail.com
Fri Sep 21 21:48:36 EDT 2007


Hi all,
Looking for some help on the kind of wet etchants available for etching Nb.
I have vaguely heard about HF(1):HNO3(1). Does anybody have an idea of
what is the etch rate of this chemical for Nb? Are there any other
etchants available for Nb? And does it etch other metals like Au, Fe,
CuMn, Ni?
Thanks,
ES...


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