[mems-talk] Nb wet etching

[Edward Sebesta]

For what it is worth, if anything. 

People who make superconducting chips etch this. Perhaps one of IBMs
journals.

You might google for squids and etch. 

Ed  

-----Original Message-----
From: mems-talk-bounces at memsnet.org
[mailto:mems-talk-bounces at memsnet.org] On Behalf Of Sadhana Patil
Sent: Friday, September 21, 2007 8:49 PM
To: mems-talk at memsnet.org
Subject: [mems-talk] Nb wet etching

Hi all,
Looking for some help on the kind of wet etchants available for etching
Nb.
I have vaguely heard about HF(1):HNO3(1). Does anybody have an idea of
what is the etch rate of this chemical for Nb? Are there any other
etchants available for Nb? And does it etch other metals like Au, Fe,
CuMn, Ni?
Thanks,
ES...