[mems-talk] Nb wet etching

[Roger Shile]

Nb can be etched with SF6 plasma.  For wet etch HF can be used.

Roger Shile

-----Original Message-----


Hi all,
Looking for some help on the kind of wet etchants available for etching
Nb.
I have vaguely heard about HF(1):HNO3(1). Does anybody have an idea of
what is the etch rate of this chemical for Nb? Are there any other
etchants available for Nb? And does it etch other metals like Au, Fe,
CuMn, Ni?
Thanks,
ES...