[mems-talk] Poly Silicon Resistivity

Rana, Mukti M mrana at uta.edu
Thu Sep 27 00:57:17 EDT 2007


Hello,

Can anyone suggest me the variation of resistivity of polysilicon with
doping concentrations? Reference of any paper or article will be
appreciated. Thank you. 

Mukti M Rana




More information about the MEMS-talk mailing list