[mems-talk] Poly Silicon Resistivity

[Suraj Patil]

Hi Mukti,

1. V.A. Gridchin, V.M.Lubimsky, M.P. Sarina, " Piezoresistive properties of
polysilicon films".
2. P. Kleiman et.al."thernmal drift of piezoresistive properties of PLCVD
polysilicon thin films between room temperature and 200 C.

I hope this helps.

Regards,
Suraj Patil


On 9/26/07, Rana, Mukti M <mrana at uta.edu> wrote:
>
> Hello,
>
> Can anyone suggest me the variation of resistivity of polysilicon with
> doping concentrations? Reference of any paper or article will be
> appreciated.