[mems-talk] PZT sol-gel process

[马腾]

Hi, MEMS guys:

We want to deposit 3um PZT film upon Pt/Ti/SiO2/Si using sol-gel. Anyone
knows vendors of materials of precursor solution, commercial PZT micro-sized
or nano-sized powder? Review paper recommendation is also welcome.  Many
thanks for your kindly suggestion.

Regards.

Teng Ma
---------
Graduate Student
School of Electromechanical Engineering
University of Electronic Science and Technology of China
North Jianshe Road, Chengdu, P.R.China
Mobile: +86-13730668144
Office: +8602883205198