[mems-talk] TiO2 thin film mechanical properties deposition dry etching

[Bhargav Nabar]

 *TiO2 thin film mechanical properties, deposition, dry etching.*

Hello everyone,

Titanium dioxide (TiO2) thin film mechanical properties : I need to deposit
a thin amorphous film of Titanium dioxide TiO2 about 100 - 200 nm thick. If
anyone has any information on the mechanical properties of thin film TiO2
such as tensile strength, Young's modulus, Bulk modulus, Fatigue, Poisson's
ratio, force -displacement results or pressure -displacement results please
help.

Titanium Dioxide (TiO2) deposition : What is the best way to deposit a thin
film of TiO2 so as to have a very low surface energy?

Titanium Dioxide (TiO2) Etching: What is the best dry etch chemistry for
TIO2? Can TiO2 be etched in Ar/Sf6 plasma at 80-90 mtorr?

Thank you.

Bhargav P Nabar.
UTA