[mems-talk] Pyrex isotropic etching

Yoshi Sakata yoshi.sakata at gmail.com
Thu Apr 3 22:28:16 EST 2008


Hi,

I'm looking for the isotropic etching method to cut grooves on a
pyrex wafer. The groove will have about 50um depth. I expect that the
bottom and side surface of the groove is smooth. Because I will put
the Au electrodes on those surface. Does someone have a good idea?

Thanks,

Yoshi


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