[mems-talk] Silicon Carbide Bonding

Ben Pecholt bpecholt at iastate.edu
Fri Apr 4 10:22:05 EST 2008


I am trying to bond a Silicon Carbide wafer (6H-SiC) in a prototype/test
packaging application (~500 C). Does anybody know of a bonding method that
will provide a strong mechanical bond? I have not heard of anybody using
anodic or fusion bonding for SiC. Thanks!

-- 
Ben Pecholt
Graduate Student
Mechanical Engineering
Iowa State University


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