[mems-talk] Photo patternable spin on glass

[sokwon Paik]

Hi
   
  I’m looking for the spin on glass which is UV patternable. I think I read one article about this in this mems-talk but I cannot find it.
   
  If anybody knows the vendor or the exact material for the SOG UV patterning, please let me know.
   
  Thank you
   
  Sokwon Paik

Postdoctoral Research Associate
Oak Ridge National Laboratory

  email: s85 at ornl.gov