[mems-talk] n-type AlGaAs ohmic contacts

vaibhav mathur kingvaibhav at hotmail.com
Thu Apr 10 01:35:25 EDT 2008


hi all,

can someone please suggest the optimum metal sequence and annealing recipe 
to form ohmic contacts directly on n-type AlGaAs?

regards
Vaibhav Mathur
PHOTONICS CENTER
UMass,Lowell


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