[mems-talk] DRIE in industry?

[Mikael Evander]

Hi.

Does anyone know how common DRIE really is in industry? It seem to  
more or less be a fairly common tool in university labs, but is it  
actually used in real facilities doing massfabrication as well? I've  
always heard that it is slow/expensive and not suited for parallel  
processing but the technique should have been refined pretty much  
over the years, no?

kind regards

Mikael