[mems-talk] n-type AlGaAs ohmic contacts

[Tolga YELBOGA]

If  i don't know false, it should be AuGe Alloy that annealed 1 minute  at
480 oC using rapit thermal processor....

Best Regards. 

Tolga YELBOGA 
Project Engineer
Nanotechnology Researh Center 
Bilkent University 
Bilkent, Ankara 06800 TURKEY 
Voice: 90-312-290-1020 
http://www.nanointurkey.com
http://www.nanotam.bilkent.edu.tr

-----Original Message-----
From: vaibhav mathur [mailto:kingvaibhav at hotmail.com] 
Sent: Thursday, April 10, 2008 8:35 AM
To: mems-talk at memsnet.org
Subject: [mems-talk] n-type AlGaAs ohmic contacts

hi all,

can someone please suggest the optimum metal sequence and annealing recipe 
to form ohmic contacts directly on n-type AlGaAs?

regards
Vaibhav Mathur
PHOTONICS CENTER
UMass,Lowell