[mems-talk] Stress reduction in a multilayers membrane

[Guillaume Bougrine]

Hello,

I am currently working on a pressure sensor whose membrane is made of SiC, W and SiO2. After anodic bonding, it came out that the membrane is really stressed since we do not need a microscope to see the deformation.
Then, I would like to know if someone have any advice or would know papers or process to get rid of this problem.

Thank you in advance.

BOUGRINE Guillaume