[mems-talk] Au peeling away from Cr adhesion layer

rmartin at systron.com rmartin at systron.com
Fri Apr 11 11:49:43 EDT 2008


In our process, there is a small co-deposition layer that ensures Cr/Au
adhesion, but we use evaporators and not sputtering systems.  Don't know if
you can do that.



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