[mems-talk] su8 1000um thick

Abhishek Jain ajain at steele.mgh.harvard.edu
Sun Apr 13 12:28:07 EDT 2008


Dear forum members

I want to make 1mm thick structures on SU8 for doing soft lithography with
PDMS later on. It is only one mask and just straight channels.

I have SU8 2075 with me and I am trying to find a recipe for doing this. If
anyone has experience in dealing with this, I will truly appreciate if you
may give some insight on the method...

thanks a lot in advance

-Abhishek Jain

-- 
Research Assistant
Edwin L. Steele Lab for Tumor Biology
149 13th Street
Massachusetts General Hospital
Harvard Medical School
Charlestown MA 02129

Graduate Student
Biomedical Engineering
Boston University
44 Cummington Street
Boston MA 02215

http://steele.mgh.harvard.edu/CV/CV.php?ID=66
http://people.bu.edu/ajain


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