[mems-talk] PDMS removing

Petru Lunca Popa petrulp at gmail.com
Mon Apr 14 06:28:11 EDT 2008


Hi

I had the same problem

Now I am using Dynasolv 210 (from a US company) and is working prety well.
If you can leave the Si chip over night in Dynasolv and then leave it
for 5 10 min in Ultrasound with Dynasolv and 5 min with acetone, this
sould be enough.

Another but "rough method" is using a razor blade to do as thin
possible the PDMS layer. When is thin enough you can clean it if you
wipe with some force with a textile with acetone. But this one is
leaving some marks on SI

The dynasolve 210 is around 100 bucks for a liter

Petru

On Wed, Mar 26, 2008 at 6:33 AM, Teimour Maleki <t.maleki at gmail.com> wrote:
> Hi All,
>
>  I did PDMS molding on silicon substrate. I forgot to put soup and now the
>  PDMS has stocked to the silicon. I tried to remove it but it left lot of
>  residue. Would you please let me know if you have any suggestion?
>


More information about the MEMS-talk mailing list