[mems-talk] wafer bonding

Prem Pal prem_mems at rediffmail.com
Tue Apr 15 00:12:55 EDT 2008

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Dear all

I wish to perform the wafer bonding process between LPCVD deposited nitride/oxide layers. Will it require cleaning prior to bonding using RCA or Piranha solution? If yes, the cleaning in Piranha solution (H2SO4+H2O2) is adequate for successful wafer bonding processAll kinds of suggestions will be highly appreciated.

Best regards

Prem
Nagoya University

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