[mems-talk] wafer bonding

[Kvel Bergtatt]

correct, Piranha cleaning is a requirement, just make sure a proper rinse
with DIW follows.

On Mon, Apr 14, 2008 at 9:12 PM, Prem Pal <prem_mems at rediffmail.com> wrote:

> Dear all
>
> I wish to perform the wafer bonding process between LPCVD deposited
> nitride/oxide layers. Will it require cleaning prior to bonding using RCA or
> Piranha solution? If yes, the cleaning in Piranha solution (H2SO4+H2O2) is
> adequate for successful wafer bonding processAll kinds of suggestions will
> be highly appreciated.
>

-- 
_fm