[mems-talk] SiO2 growth on bare silicon

Jose Guevarra jose.dr.g at gmail.com
Sat Apr 19 01:33:12 EDT 2008


Hi,

   I've found that the grove-deal model of oxidation doesn't work well 
for growing oxide on bare silicon waters.  What model should I use to 
try to find the time to grow say a 200 angstrom layer of oxide (dry 
and/or wet)?

Thanks.

-Jose


More information about the MEMS-talk mailing list