[mems-talk] SiO2 growth on bare silicon

[Peng Li]

I heard there is a program called SUPREM for process simulation. However,
I don't have hands-on experiences on it.


> Hi,
>
>    I've found that the grove-deal model of oxidation doesn't work well
> for growing oxide on bare silicon waters.  What model should I use to
> try to find the time to grow say a 200 angstrom layer of oxide (dry
> and/or wet)?

-- 
Peng Li
Research Assistant
Department of Mechanical Engineering & Applied Mechanics
University of Rhode Island
133D Kirk, 92 Upper College Road,
Kingston, RI  02881
Phone: (401) 874-2247