[mems-talk] Silicon fracture strength

Andrea Mazzolari mazzolari at fe.infn.it
Sat Apr 19 17:20:09 EDT 2008


Hi all,
i need to bend very thin (50um or less) silicon crystals. I'm looking for
informations about silicon fracture strength in order to be able to
predict the maxium bending radius which can be achieved.
Any suggestion to some literature treating this topic ? I've tried to
search for it, but i've been not very lucky.

Many thanks,
Andrea



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