[mems-talk] PET

[Teimour Maleki]

Hi,
 I have two paper and a patent on etching vertical PET (2003). Have you seen
that?
Thanks,
-Teimour

-----Original Message-----
From: mems-talk-bounces at memsnet.org [mailto:mems-talk-bounces at memsnet.org]
On Behalf Of Thomas Reddy
Sent: Saturday, April 19, 2008 1:36 AM
To: mems-talk at memsnet.org
Subject: [mems-talk] PET

Hello
I wanna  to do  a  vertical etch  on PET  but every time i tried a lot  of
crack considered.
what should i do?
thanks