[mems-talk] Teflon Paterning

Teimour Maleki t.maleki at gmail.com
Sun Apr 20 23:34:46 EDT 2008


Dear all,
 I am trying to pattern a thin film of Teflon on silicon substrate. I tried
argon plasma activation, it seems fine, but I have problem with adhesion of
Teflon to silicon. When I do post processing, it will pill of. Any comments
on this will be appreciated very much.
Thanks,
-Teimour



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