[mems-talk] Teflon Patterning

[Michael Larsson]

Hi Teimour,

Do what they do to get PTFE to stick to the surface of frying pans -
mechanical interlocking. Roughen-up your Si surface using RIE (you
could try an isotropic recipe, through a mask) prior to PTFE
deposition and this should help.

Regards,

Michael


>
> ---------- Forwarded message ----------
> From: "Teimour Maleki" <t.maleki at gmail.com>
> To: "'General MEMS discussion'" <mems-talk at memsnet.org
> Date: Sun, 20 Apr 2008 23:34:46 -0400
> Subject: [mems-talk] Teflon Paterning
> Dear all,
>  I am trying to pattern a thin film of Teflon on silicon substrate. I tried
> argon plasma activation, it seems fine, but I have problem with adhesion of
> Teflon to silicon. When I do post processing, it will pill of. Any comments
> on this will be appreciated very much.
> Thanks,
> -Teimour