[mems-talk] DRIE in industry?

[Albert Henning]

This article is no longer available.

Albert K. Henning, PhD
Director of MEMS Technology
NanoInk, Inc.
215 E. Hacienda Avenue
Campbell, CA  95008
408-379-9069  ext 101
ahenning at nanoink.net

-----Original Message-----
From: pinelis at umich.edu [mailto:pinelis at umich.edu] 
Sent: Thursday, April 17, 2008 10:49 PM
To: mems-talk at memsnet.org
Subject: Re: [mems-talk] DRIE in industry?

Here is a very recent article on DRIE and MEMS:

http://ap.pennnet.com/display_article/325749/36/ARTCL/none/n-
one/1/DRIE-for-MEMS-devices/

Mike