[mems-talk] SU-8 2025 and 80 micron high features w/ HMDS?

Jose Guevarra jose.dr.g at gmail.com
Mon Aug 4 14:43:32 EDT 2008


I did try HMDS and that seems to work fairly well.

Thanks.

Oakes Garrett wrote:
> You should try the SU-8 adhesion promoters that are on the market.  MCC
> and Silicon Resources in Chandler Arizona both have products that work
> well.  What type of wafer are you using?
> 
> Best Regards,
> 
> Garrett Oakes


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