[mems-talk] Si DRIE foundry

[Prashanth Makaram]

Hi,
we are a small startup in France and we are trying to do a backside 
plasma etch with an aspect ratio of 1:10 on 200 mm silicon wafers. We 
also need to align these trenches with patterns on the front side of the 
wafer.  I woudl appreciate if you could point us to some foundries that 
would take up this lithography and etching process. Can you also give me 
a cost estimate on this process.
thanks
prashanth