[mems-talk] Su 8 thickness

[jiang Liudi]

Dear all,
 
I was trying to obtain >100um thick of patterned SU8 2075. The used receipe is as follows:
 
spin: 500rpm/10s+1700rpm/30sec
soft bake: 65 C/5 mins +95 C/20min
UV expose: 28 sec. 
PEB: 65 C/5 mins +95 C/10 min
develop: 10 mins. 
 
all designed patterns are large ( all around 50-200um). However, using profiler, the  step of the developed patterns is only about 66 um thick. 
 
Could anyone kindly suggest the possible reasons for such thin resist?
 
Many thanks. 
Jiang