[mems-talk] Su 8 thickness

jiang Liudi ldjiang at hotmail.com
Thu Aug 7 03:26:52 EDT 2008


Hi,
Many thanks for kind suggestions. 
 
I think double coat could be the solution. could you further suggest procedures of double layers in terms of baking, expose and PEB?According according to the data sheet, 1700rpm should get almost 140um thickness. is it common for half the thickness, compared with the sheet?
 
thanks again. 


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