[mems-talk] Wet etch for GST

[prashanth busa]

Group,

I am looking for a wet etch solution or staining technique to etch
GeSbTe-225 (phase change material) to distinguish amorphous/crystalline
regions using a SEM. I couldn't find any literature that shows the grain
structure of GST using a SEM and not TEM.

Appreciate your help.

Thanks,
Prashanth