[mems-talk] problem with Photopatternable PDMS

[Mohd.Yusuf]

Hello,

            I am facing some problem with Photopatternable PDMS WL 5351
(from dowcorning corp.) . I am working with 5351 since last 3 months, since
old pdms was out dated we ordered new pdms. With new PDMS i tried to get
same structures using same old recepie but is is giving bad structures with
bubbles or ruptured bubbles on developed structures.
I also tried to degass the PDMS in vacuum before spinning on wafer.

I have 2inch silicon wafer and pdms thickness of ~6microns. Structures are
~25 x 75 micron rectangles.

Any suggestions to solve this problem.

-- 
Yusuf
Germany.